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Modification of the laser triangulation method for measuring the thickness of optical layers

Наименование публикации Modification of the laser triangulation method for measuring the thickness of optical layers
Тип публикации Статья
Библиографическое описание V. N. Khramov, A. A. Adamov, "Modification of the laser triangulation method for measuring the thickness of optical layers," Proc. SPIE 10717, Saratov Fall Meeting 2017: Laser Physics and Photonics XVIII; and Computational Biophysics and Analysis of Biomedical Data IV, 1071703 (26 April 2018); doi: 10.1117/12.2314820
Аннотация The problem of determining the thickness of thin films by the method of laser triangulation is considered. An expression is derived for the film thickness and the distance between the focused beams on the photo detector. The possibility of applying the chosen method for measuring thickness is in the range [0.1; 1] mm. We could resolve 2 individual light marks for a minimum film thickness of 0.23 mm. We resolved with the help of computer processing of photos with a resolution of 0.10 mm. The obtained results can be used in ophthalmology for express diagnostics during surgical operations on the corneal layer.
Ключевые cлова laser triangulation, thickness, thin film, cornea, CCD matrix, refractive index
Год публикации 2018
Автор(ы)
Храмов Владимир Николаевич
Адамов Антон Андреевич
Электронная копия публикации -